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DOI RECORD

Bayesian optimization-guided co-sputtering of ferroelectric AlScN thin films for enhanced functional performance

Hanbin Shin, Jinseok Hwang, Chanmo Kang, Seungmin Lee, Semin Kim, Junheon Lee, Sahar Ayachi, Hyeon-kyo Song, Hyun-Cheol Song, Won Young Choi iD, Soo Deok Han

DOI10.1557/s43579-026-01054-2

PublisherSpringer Science and Business Media LLC

Journal / SourceMRS Communications

Published2026-09-30

Metadata Deposited2026-09-30 (updated: 2026-09-30)

Subject—

Languageen

ISSN2159-6859, 2159-6867

Typejournal-article

Volume / Issue / Pages— / — / —

Citations0

References deposited27

Access / license metadataAccess not determined License 1 ↗A reuse license does not by itself establish whether the full text is freely readable.

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